Detection of pH variation using modified microcantilever sensors
نویسندگان
چکیده
منابع مشابه
Detection of pH variation using modi®ed microcantilever sensors
A micromechanical technique for measuring solution pH using modi®ed silicon (SiO2) and silicon nitride (Si3N4) microcantilevers is described. As the modi®ed surface of the cantilever accumulates charge proportional to the pH of the surrounding liquid, the cantilever undergoes bending due to the differential surface stress. Results are presented for chemically modi®ed (4-aminobutyltriethoxysilan...
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ژورنال
عنوان ژورنال: Sensors and Actuators B: Chemical
سال: 2001
ISSN: 0925-4005
DOI: 10.1016/s0925-4005(00)00678-x